A simple projection photolithography method for low-cost rapid prototyping of microfluidic chips

نویسندگان

چکیده

Abstract Presented herein is a masking method for SU8 based soft lithography which utilizes simple optical setup using transparencies printed with commercial standard office printer. The relatively low printing quality of the printer partly overcome by imaging mask negative magnification that cheap and easily available parts. as well resulting master assessed means microscopic imaging.

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ژورنال

عنوان ژورنال: Microfluidics and Nanofluidics

سال: 2022

ISSN: ['1613-4982', '1613-4990']

DOI: https://doi.org/10.1007/s10404-022-02531-5